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Surface Plasmonic Lens Driven Photoelectron Source For Multi-Beam Applications, Heon Joon Choi

Legacy Theses & Dissertations (2009 - 2024)

Surface plasmon polariton (SPP) assisted photoelectron source array is proposed for use in distributed multiple electron beam lithography applications. Individual source is composed of a metal/dielectric surface structure with concentric circular grooves of subwavelength width surrounding a sub-wavelength aperture. Such optical power concentrators, called "plasmonic lenses", collect light incident over a broad area by converting it to surface electromagnetic waves, specifically SPP's, through diffraction by the sub-wavelength grooves surrounding the aperture. Through constructive interference of the generated SPPs between neighboring grooves, controlled by the periodicity of the grooves, high optical power densities can be achieved at the center of the …