Physics Commons^™

Control Of Charged Particle Dynamics And Electron Power Absorption Dynamics Utilizing Voltage Waveform Tailoring In Capacitively Driven Radio-Frequency Plasmas, Steven W. Brandt

Graduate Theses, Dissertations, and Problem Reports

In this work, experimental measurements and analysis of numerical simulations are performed for capacitively coupled plasmas driven by tailored voltage waveforms under conditions which examine complicating factors present in industrial processes, including the influence of resonance effects, electronegative gases or gas mixtures, and plasma-surface interactions at a changing plasma-surface interface. Furthermore, the influence of different tailored voltage waveforms on the spatio-temporal electron power absorption, the generation of a DC self-bias, and on process relevant plasma parameters like ion energy distribution functions is investigated to provide a more complete understanding of the underlying fundamental plasma physics responsible for sustaining the discharge. …