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Si Nanocrystal Synthesis Via Double Implantation And Variable Implantation, James M. Gaudet

Electronic Thesis and Dissertation Repository

Silicon (Si) nanocrystals (nc) precipitated from silicon-implanted silicon oxide (SiO₂) are of interest as a novel light source for illumination, biomedical applications, optical computing, etc. They have some advantages over conventional III-V compound semiconductor nanocrystals produced by colloidal synthesis. They are compatible with Si/SiO₂ based semiconductor processing, are stable, non-toxic at point of synthesis and consumption, and their luminescence falls with the infrared transmission window of biological materials. Unfortunately, synthesis of Si-nc embedded SiO₂ is uneconomical and is not as amenable to precise control of the size distribution of nanocrystals as is the case for III-V …