Physics Commons^™

Microwave Enhanced Electron Energy Distribution Functions, John Samuel Mckee

Graduate Theses, Dissertations, and Problem Reports

The use of two (or more) radio frequency (RF) sources at different frequencies is a common technique in the plasma processing industry to control ion energy characteristics separately from plasma generation. A similar approach is presented here with the focus on modifying the electron population in argon and helium plasmas. The plasma is generated by a helicon source at a frequency f0 = 13.56 MHz. Microwaves of frequency f1 = 2.45 GHz are then injected into the helicon source chamber perpendicular to the background magnetic field. The microwaves damp on the electrons via R-mode (anti-parallel to the background magnetic field …