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Transport In Chaotic Systems, Xian Zhu Tang
Transport In Chaotic Systems, Xian Zhu Tang
Dissertations, Theses, and Masters Projects
This dissertation addresses the general problem of transport in chaotic systems. Typical fluid problem of the kind is the advection and diffusion of a passive scalar. The magnetic field evolution in a chaotic conducting media is an example of the chaotic transport of a vector field. In kinetic theory, the collisional relaxation of a distribution function in phase space is also an advection-diffusion problem, but in a higher dimensional space.;In a chaotic flow neighboring points tend to separate exponentially in time, exp({dollar}\omega t{dollar}) with {dollar}\omega{dollar} the Liapunov exponent. The characteristic parameter for the transport of a scalar in a chaotic …
Surface Reflection Hyperthermal Neutral Stream Source, Christopher A. Nichols
Surface Reflection Hyperthermal Neutral Stream Source, Christopher A. Nichols
Dissertations, Theses, and Masters Projects
A novel source of hyperthermal (1-30 eV) reactive neutrals based on the surface-reflection-neutralization technique is described. This source is potentially capable of minimizing the charge-induced damage associated with plasma based semiconductor processing steps. The goal of this thesis is to investigate the issues involved in scale-up of this technology for processing of 8{dollar}\sp{lcub}\prime\prime{rcub}{dollar} diameter wafers used today in the semiconductor industry. This includes modeling the plasma ion source and trajectory simulations of the reflected neutral flux. A prototype source was constructed for experimental verification of the plasma model.;An inductively coupled plasma (ICP) source is used to provide a source of …