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Ultra-Thin Silicon Wafer Bonding, Diyu Yan
Ultra-Thin Silicon Wafer Bonding, Diyu Yan
Theses
In this thesis the history and recent developments on the silicon direct bonding technique are reviewed. The growing applications of this technique in SOI, SOS and MEMS areas, difficulties and disadvantages of various bonding processes are discussed. A direct bonding procedure for attaching ultra-thin wafers less than 200 μm thick to substrate wafers is developed and described in detail. Difficulties in handling, aligning and annealing ultra-thin wafers are reported. Wafers of different doping concentration, thickness, surface roughness and chemical characteristics are tested for bondability. Methods to minimize voids and other failure mechanisms are proposed. A photodetector is designed based on …