Physics Commons^™

A Study Of Scattering Characteristics For Micro-Scale Rough Surface, Yonghee Won

Graduate Theses - Physics and Optical Engineering

Defining the scatter characteristics of surfaces plays an important role in various technology industries such as the semiconductor, automobile, and military industries. Scattering can be used to inspect products for problems created during the manufacturing process and to generate the specifications for engineers. In particular, scattering measurement systems and models have been developed to define the surface properties of a wide variety of materials used in manufacturing. However, most previous research has been focused on very smooth surfaces as a nano-scale roughness. The research in this paper uses the Bidirectional Reflectance Distribution Function (BRDF) and focuses on defining the scattering …