Physics Commons^™

Spectroscopic End Point Detection With An Electron Beam Evaporator, Ryan Mcgraw

University Honors Theses

Spectroscopic end point detection is a common tool used for measuring slope changes in wavelength intensity. Using algorithms able to apply this concept, coatings will be able to be dynamically measured in real time and stopped at the appropriate level to ensure process uniformity. It is currently applied to reductive processes such as etching, where the surface will start to be eaten away, creating a plasma. When the entire amount of a material on a substrate has been eaten away, the plasma will change color as it is beginning to etch a different material. Using a spectrometer, this point where …