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Interferometric Lithography- An Approach To Large Area And Cost Effective Nanopatterning, Vineeth Sasidharan Nov 2021

Interferometric Lithography- An Approach To Large Area And Cost Effective Nanopatterning, Vineeth Sasidharan

Optical Science and Engineering ETDs

In this dissertation interferometric lithography is approached in two different ways to address two important constraints of nanopatterning. One approach solves the problem of scaling up interferometric lithography to wafer scale (4 inch or larger) area. Through the second approach we have developed a nanopatterning technique based on interferometric lithography by using an inexpensive (~$100) diode laser as source, making interferometric lithography a very cost-effective technique.

Wafer-scale large-area nanopatterning was developed using an amplitude grating mask as a grating beam splitter along with spatial averaging of laser intensity by wobbling. The longitudinal and transverse coherence issues both are eased by …


Controlling Nanoparticles Formation In Molten Metallic Bilayers By Pulsed-Laser Interference Heating, Mikhail Khenner, Sagar Yadavali, Ramki Kalyanaraman Jan 2012

Controlling Nanoparticles Formation In Molten Metallic Bilayers By Pulsed-Laser Interference Heating, Mikhail Khenner, Sagar Yadavali, Ramki Kalyanaraman

Mathematics Faculty Publications

The impacts of the two-beam interference heating on the number of core-shell and embedded nanoparticles and on nanostructure coarsening are studied numerically based on the non-linear dynamical model for dewetting of the pulsed-laser irradiated, thin (< 20 nm) metallic bilayers. The model incorporates thermocapillary forces and disjoining pressures, and assumes dewetting from the optically transparent substrate atop of the reflective support layer, which results in the complicated dependence of light reflectivity and absorption on the thicknesses of the layers. Stabilizing thermocapillary effect is due to the local thickness-dependent, steady- state temperature profile in the liquid, which is derived based on the mean substrate temperature estimated from the elaborate thermal model of transient heating and melting/freezing. Linear stability analysis of the model equations set for Ag/Co bilayer predicts the dewetting length scales in the qualitative agreement with experiment.


Controlling Nanoparticles Formation In Molten Metallic Bilayers By Pulsed-Laser Interference Heating, Mikhail Khenner, Sagar Yadavali, Ramki Kalyanaraman Jan 2012

Controlling Nanoparticles Formation In Molten Metallic Bilayers By Pulsed-Laser Interference Heating, Mikhail Khenner, Sagar Yadavali, Ramki Kalyanaraman

Mikhail Khenner

The impacts of the two-beam interference heating on the number of core-shell and embedded nanoparticles and on nanostructure coarsening are studied numerically based on the non-linear dynamical model for dewetting of the pulsed-laser irradiated, thin (< 20 nm) metallic bilayers. The model incorporates thermocapillary forces and disjoining pressures, and assumes dewetting from the optically transparent substrate atop of the reflective support layer, which results in the complicated dependence of light reflectivity and absorption on the thicknesses of the layers. Stabilizing thermocapillary effect is due to the local thickness-dependent, steady- state temperature profile in the liquid, which is derived based on the mean substrate temperature estimated from the elaborate thermal model of transient heating and melting/freezing. Linear stability analysis of the model equations set for Ag/Co bilayer predicts the dewetting length scales in the qualitative agreement with experiment.