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Afm-Patterned 2-D Thin-Film Photonic Crystal Analyzed By Complete Angle Scatter, Nicholas C. Herr

Theses and Dissertations

The purpose of this research was to use an atomic force microscope (AFM) to generate a 2-D square array of sub-wavelength surface features from a single material over a region large enough to permit optical characterization. This work is an extension of previous AFIT nano-patterning work and is in response to the small subunit sizes demanded for the production of optical metamaterials and photonic crystals. A diamond nano-indentation AFM probe was used to produce a 325-μm by 200-μm array of indentations in a 120-nm thick polystyrene film deposited on silicon. Indentation spacing of 400 nm produced well-defined surface features with …