Physics Commons^™

Intracavity Phase Interferometry Based Fiber Sensors, Luke Jameson Horstman

Optical Science and Engineering ETDs

Intracavity Phase Interferometry (IPI) is a detection technique that exploits the inherent sensitivity of a laser's frequency to the parameters of its cavity. Intracavity interferometry is orders of magnitude more sensitive than its extracavity alternatives. This dissertation improves on previous free-space proof-of-concept designs. By implementing the technique in fiber optics, using optical parametric oscillation, and investigating non-Hermitian quantum mechanics and dispersion tailoring enhancement techniques, IPI has become more applicable and sensitive. Ring and linear IPI configurations were realized in this work, both operating as bidirectional fiber optical parametric oscillators. The benefit of using externally pumped synchronous optical parametric oscillation is …

Integrated Chirped-Grating Spectrometer-On-A-Chip, Shima Nezhadbadeh

Optical Science and Engineering ETDs

In this dissertation we demonstrate a new structure based on waveguide coupling atop a silicon wafer using a chirped grating to provide the dispersion that leads to a high-resolution, compact, fully integrable and CMOS-compatible spectrometer. Light is both analyzed and detected in a single, completely monolithic component which enables realizing a high-resolution portable spectrometer with an extremely compact footprint. The structure is comprised of a SiO₂/Si₃N₄/SiO₂ waveguide on top of a silicon wafer. Grating regions are fabricated on the top cladding of the waveguide. The input light is incident on a chirped grating …

Novel Compact Narrow-Linewidth Mid-Infrared Lasers For Sensing Applications, Behsan Behzadi

Optical Science and Engineering ETDs

The mid-infrared (2-14 μm) spectral region contains the strong absorption lines of many important molecular species, which make this region crucial for several well-know applications such as spectroscopy, chemical and biochemical sensing, security, and industrial monitoring. To fully exploit this region through absorption spectroscopic techniques, compact and low-cost narrow-linewidth (NLW) mid-infrared (MIR) laser sources are of primary importance.

This thesis is focused on three novel compact NLW MIR lasers: demonstration and characterization of a new glass-based spherical microlaser, investigation of the performance of a novel fiber laser, and the design of a monolithic laser on a silicon chip. Starting with …

Scatterometry Of 50 Nm Half Pitch Features, Ruichao Zhu

Optical Science and Engineering ETDs

Metrology technologies are an essential adjunct to Integrated Circuit (I.C.) Semiconductor manufacturing. Scatterometry, an optical metrology, was chosen to measure 50 nm half pitch feature structures. A bread-board scatterometry system has been assembled to provide a non-contact, non-destructive, accurate and flexible measurement. A real-time, on-line scatterometry system has also been demonstrated and proven to provide a high throughput measurement.

Three different types of samples have been measured using the scatterometry setup. The wire-grid polarizer (WGP) sample has been made by Jet and Flash Nanoimprint Lithography with ~100 nm pitch and ~50 nm wide ~200 nm tall Al gratings on fused …