Physics Commons^™

Laser-Spark Multicharged Ion Implantation System ‒ Application In Ion Implantation And Neural Deposition Of Carbon In Nickel (111), Oguzhan Balki

Electrical & Computer Engineering Theses & Dissertations

Carbon ions generated by ablation of a carbon target using an Nd:YAG laser pulse (wavelength λ = 1064 nm, pulse width τ = 7 ns, and laser fluence of 10-110 J/cm²) are characterized. Time-of-flight analyzer, a three-mesh retarding field analyzer, and an electrostatic ion energy analyzer are used to study the charge and energy of carbon ions generated by laser ablation. The dependencies of the ion signal on the laser fluence, laser focal point position relative to target surface, and the acceleration voltage are described. Up to C⁴⁺ are observed. When no acceleration voltage is applied between …

Development Of A Laser-Spark Multicharged Ion System – Application In Shallow Implantation Of Sic By Boron And Barium, Md. Haider Ali Shaim

Electrical & Computer Engineering Theses & Dissertations

A novel multicharged ion source, using laser ablation induced plasma coupled with spark discharge, has been investigated in this work. The designed and demonstrated ion source is cost-effective, compact and versatile. Experiments are described with the intention of demonstrating the practicability of ion implantation via laser ion source.

Multicharged aluminum ions are generated by a ns Q-switched Nd:YAG laser pulse ablation of an aluminum target in an ultrahigh vacuum. The experiments are conducted using laser pulse energies of 45–90 mJ focused on the Al target surface by a lens with an 80-cm focal length to 0.0024 cm² spot area …