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Full-Text Articles in Physics
Scatterometry Of 50 Nm Half Pitch Features, Ruichao Zhu
Scatterometry Of 50 Nm Half Pitch Features, Ruichao Zhu
Optical Science and Engineering ETDs
Metrology technologies are an essential adjunct to Integrated Circuit (I.C.) Semiconductor manufacturing. Scatterometry, an optical metrology, was chosen to measure 50 nm half pitch feature structures. A bread-board scatterometry system has been assembled to provide a non-contact, non-destructive, accurate and flexible measurement. A real-time, on-line scatterometry system has also been demonstrated and proven to provide a high throughput measurement.
Three different types of samples have been measured using the scatterometry setup. The wire-grid polarizer (WGP) sample has been made by Jet and Flash Nanoimprint Lithography with ~100 nm pitch and ~50 nm wide ~200 nm tall Al gratings on fused …
Experimental Investigation Of Plasma Dynamics In Jets And Bubbles Using A Compact Coaxial Plasma Gun In A Background Magnetized Plasma, Yue Zhang
Electrical and Computer Engineering ETDs
Numerous solar and astrophysical observations of jet- and bubble-like plasma structures exhibit morphological similarities, suggesting that there may be common plasma physics at work in the formation and evolution processes of these structures at different system scales. The ideal magnetohydrodynamics (MHD) provide the necessary theoretical basis for employing laboratory experiments to investigate key physical processes in nonlinear astrophysical and solar systems, especially when magnetic fields are present.
A coaxial magnetized plasma gun has been designed, installed, and operated in the HelCat linear device at the University of New Mexico. In Region I, a current-driven plasma jet is formed. The plasma …