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Focused Electron-Beam-Induced Deposition For Fabrication Of Highly Durable And Sensitive Metallic Afm-Ir Probes, Wen Qian, Shuo Sun, Jingfeng Song, Charles Nguyen, Stephen Ducharme, Joesph A. Turner
Focused Electron-Beam-Induced Deposition For Fabrication Of Highly Durable And Sensitive Metallic Afm-Ir Probes, Wen Qian, Shuo Sun, Jingfeng Song, Charles Nguyen, Stephen Ducharme, Joesph A. Turner
Stephen Ducharme Publications
We report on the fabrication of metallic, ultra-sharp atomic force microscope tips for localized nanoscale infrared (IR) spectrum measurements by using focused electron-beam-induced deposition of platinum or tungsten. The tip length can be controlled by changing the duration time of the electron beam. Probes of 12.0 ± 5.0 nm radius-of-curvature can be routinely produced with high repeatability and near-100% yield. The near-field-enhancement appears stronger at the extremity of the metallic tip, compared with commercial pristine silicon-nitride probe tip. Finally, the performance of the modified metallic tips is demonstrated by imaging PVDF and PMMA thin films, which shows that spatial resolution …