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Systems For Assessing And Enhancing The Performance Of Scanning Electron Microscopes By Quantifying And Enforcing Symmetries And Periodicities In Two Dimensions, Peter Moeck
Physics Faculty Publications and Presentations
Scanning probe microscope (SPM) images are enhanced by enforcing one or more symmetries that can be selected based on suitable Fourier coefficient amplitude or phase angle residuals, and/ or geometric Akaike information criteria, and/ or cross correlation techniques. Alternatively, this selection can be based on prior knowledge of specimen characteristics. In addition, a scanning microscope point spread function is obtained based on the evaluation of a calibration image by enforcing at least one symmetry and can be applied to other image acquisitions.