Physics Commons^™

Growth Of Small Particles In Nonequilibrium Plasmas, Necip Berker Üner

McKelvey School of Engineering Theses & Dissertations

Nonequilibrium plasma (NEP) is an extraordinary environment for material synthesis. NEP is comprised of hot electrons with temperatures greater than 10000 K and of cold ions and neutrals that are usually at few hundred kelvins above room temperature. Due to this large difference in species’ temperatures, the assumption of local thermal equilibrium does not hold in NEP. Therefore, NEP can act as a unique processor of mass, and it can transform materials along pathways that are not accessible by methods wherein local thermal equilibrium is valid. For decades, NEPs have been employed in the semiconductor industry to manufacture many thin …