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Thorium-Based Thin Films As Highly Reflective Mirrors In The Euv, David D. Allred, William R. Evans, Jed E. Johnson, Richard L. Sandberg, R. Steven Turley
Thorium-Based Thin Films As Highly Reflective Mirrors In The Euv, David D. Allred, William R. Evans, Jed E. Johnson, Richard L. Sandberg, R. Steven Turley
Faculty Publications
As applications for extreme ultraviolet (EUV) radiation have been identified, the demand for better optics has also increased. Thorium and thorium oxide thin films (19 to 61 nm thick) were RF-sputtered and characterized using atomic force microscopy (AFM), spectroscopic ellipsometry, low-angle x-ray diffraction (LAXRD), x-ray photoelectron spectroscopy (XPS), and x-ray absorption near edge structure (XANES) in order to assess their capability as EUV reflectors. Their reflectance and absorption at different energies were also measured and analyzed at the Advanced Light Source in Berkeley. The reflectance of oxidized thorium is reported between 2 and 32 nm at 5, 10, and 15 …