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Development And Thinking Of Silicon Photonics Heterogenous Integration, Zihao Wang, Ting Wang, Jianjun Zhang
Development And Thinking Of Silicon Photonics Heterogenous Integration, Zihao Wang, Ting Wang, Jianjun Zhang
Bulletin of Chinese Academy of Sciences (Chinese Version)
Integrated photonics are fast-developing research field for next generation information technology. Current silicon photonic integrated chips strongly benefit from low-cost and high-density integration properties of existing CMOS technology. But limited by the physical properties of silicon, it is not a perfect material for different types of optoelectronic devices, such as laser sources, modulators, and infrared detectors. Therefore, heterogeneous integration is proposed by combining the advantages of CMOS process and superior opto-electric properties of heterogenous material systems, that can be an essential step towards next generation integrated optoelectronic chips. Here, this paper introduces the rapid progress of integrated photonics nationally and …