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Excimer Emission From Cathode Boundary Layer Discharges, Mohamed Moselhy, Karl H. Schoenbach

Bioelectrics Publications

The excimer emission from direct current glow discharges between a planar cathode and a ring-shaped anode of 0.75 and 1.5 mm diameter, respectively, separated by a gap of 250 μm, was studied in xenon and argon in a pressure range from 75 to 760 Torr. The thickness of the “cathode boundary layer” plasma, in the 100 μm range, and a discharge sustaining voltage of approximately 200 V, indicates that the discharge is restricted to the cathode fall and the negative glow. The radiant excimer emittance at 172 nm increases with pressure and reaches a value of 4 W/cm² for …