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Plasma Polymerization Of Tetrafluoroethylene. I. Inductive Radio Frequency Discharge, H. Yasuda, N. Morosoff, E. S. Brandt, C. N. Reilley

Chemistry Faculty Research & Creative Works

The plasma polymerization of tetrafluoroethylene in an inductively coupled radio frequency glow discharge, using a flow system, was studied. A simple long tube reactor, with the coupling coil placed at the middle of the tube and gas entrance and exit at the respective ends, was used. Deposition rates and the chemical nature of the polymer (as revealed by ESCA spectra and surface energy studies) are obtained as a function of location in the reactor tube with respect to the coupling coil and of applied energy per unit mass of tetrafluoroethylene (W/FM). It was found that a fluorine poor polymer, containing …