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Self-Organization In Cathode Boundary Layer Discharges, Nobuhiko Takano
Self-Organization In Cathode Boundary Layer Discharges, Nobuhiko Takano
Electrical & Computer Engineering Theses & Dissertations
Cathode boundary layer (CBL) discharge, which has been developed as a UV light source, operates in a direct current between a planar cathode and a ring-shape anode that are separated by a dielectric with an opening of the same diameter as the anode. The nonthermal CBL discharges operate in a medium pressure range down to 30 Torr, emitting excimer radiation when operated with noble gases. The radiant excimer emittance at 172 nm in xenon reaches 1.7 W/cm2, and a maximum excimer efficiency of 6 % has been obtained. The high excimer radiant emittance, in addition to low cost …