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Integrated Grating Couplers On-A-Chip: Characterizations And Applications, Xuemei Wang

Optical Science and Engineering ETDs

We demonstrate two applications based on grating coupled phase matching to a slab waveguide: lab-on-a-chip spectrometer using a transversely chirped grating and indoor lidar plenoptic sensor array for Time of flight (ToF) position mapping system. In the first application, a chirped grating waveguide coupler serves as a spatially dependent narrow-band filter. The transversely-chirped-input grating is fabricated on a SiO₂-Si₃N₄-SiO₂ waveguide atop a Si substrate by interferometric lithography. Light with wavelength from 400- nm to 700 nm couples into Si₃N₄ waveguide through transversely chirped grating incident at a 33.5⁰ angle and …