Operations Research, Systems Engineering and Industrial Engineering Commons^™

Thin-Film Simulation Model For Comparing Production Schedules In A Semiconductor Fabrication Facility, Amr Arisha, Paul Young

Conference papers

Analysis of advanced manufacturing systems in any manufacturing industry requires certain level of knowledge about the system. Flexible manufacturing cells, in particular, are commonly used in most wafer fabrication to provide the ability to change product without requiring the construction of new manufacturing plant. This level of flexibility comes at a significant capital cost and, in order to achieve the maximum potential of each cell, it is essential to characterize and establish the performance of these cells in detail before a new production plan is implemented. Using state-of-the-art computer simulation and a structured modelling methodology a generic model of flexible …