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Operations Research, Systems Engineering and Industrial Engineering Commons

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Full-Text Articles in Operations Research, Systems Engineering and Industrial Engineering

The Need For Pfc Abatement In Semiconductor Manufacturing, Mohsen Manesh, Brian Kendrick Jan 2002

The Need For Pfc Abatement In Semiconductor Manufacturing, Mohsen Manesh, Brian Kendrick

Inquiry: The University of Arkansas Undergraduate Research Journal

Perfluorocompounds (PFCs) are highly stable chemical compounds used in two integral steps of semiconductor manufacturing: chemical vapor deposition (CVD) chambers and etch chambers. Unfortunately, PFCs are also greenhouse gases linked to global warming. This, combined with their long atmospheric lifetimes gives them global warming potentials much higher than C02 the principal greenhouse gas. In a series of voluntary agreements with the United States and other national governments, the worldwide semiconductor industry has set a goal of reducing PFC emissions to 90% of their 1995 levels. To reach this goal, researchers have explored four main methods of reduction: substitution of PFCs, …


Adaptive Critic-Based Neural Network Controller For Uncertain Nonlinear Systems With Unknown Deadzones, Pingan He, Jagannathan Sarangapani, S. N. Balakrishnan Jan 2002

Adaptive Critic-Based Neural Network Controller For Uncertain Nonlinear Systems With Unknown Deadzones, Pingan He, Jagannathan Sarangapani, S. N. Balakrishnan

Electrical and Computer Engineering Faculty Research & Creative Works

A multilayer neural network (NN) controller in discrete-time is designed to deliver a desired tracking performance for a class of nonlinear systems with input deadzones. This multilayer NN controller has an adaptive critic NN architecture with two NNs for compensating the deadzone nonlinearity and a third NN for approximating the dynamics of the nonlinear system. A reinforcement learning scheme in discrete-time is proposed for the adaptive critic NN deadzone compensator, where the learning is performed based on a certain performance measure, which is supplied from a critic. The adaptive generating NN rejects the errors induced by the deadzone whereas a …


A Distributed Discrete-Time Neural Network Architecture For Pattern Allocation And Control, A.T. Chronopoulos, Jagannathan Sarangapani Jan 2002

A Distributed Discrete-Time Neural Network Architecture For Pattern Allocation And Control, A.T. Chronopoulos, Jagannathan Sarangapani

Computer Science Faculty Research & Creative Works

No abstract provided.