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Characterization Of Pet Samples Processed In An Rf Oxygen Discharge, Russell L. Rhoton

Master's Theses and Doctoral Dissertations

A radio frequency plasma (13.56 MHz) was used to modify the surface of a poly (ethylene terepthalate) (PET) sample. The plasma was generated in a pure oxygen process atmosphere at pressures of 100 mTorr, and 2.0 Torr at output powers of 250 Watts and 500 Watts.

Optical emission spectroscopy (OES) was used to characterize the plasma/sample interaction. Spectra were measured from 250 nm to 900 nm during each of the processing sessions.

The spectra showed changes depending upon the pressure of the plasma. Molecules of OH and atomic oxygen were observed at low pressures (100 mTorr), whereas CO and atomic …