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Full-Text Articles in Operations Research, Systems Engineering and Industrial Engineering
Intelligent Simulation-Based Lot Scheduling Of Photolithography Toolsets In A Wafer Fabrication Facility, Amr Arisha, Paul Young
Intelligent Simulation-Based Lot Scheduling Of Photolithography Toolsets In A Wafer Fabrication Facility, Amr Arisha, Paul Young
Conference papers
Scheduling of a semiconductor manufacturing facility is one of the most complex tasks encountered. Confronted with a high technology product market, semiconductor manufacturing is increasingly more dynamic and competitive in the introduction of new products in shorter time intervals. Photolithography, being one of the processes repeated often, is a fabrication bottleneck. Lot scheduling within photolithography is a challenging activity where substantial improvements in factory performance can be made. The proposed scheduling methodology integrates two common approaches, simulation and artificial intelligence. Using detailed simulation modeling within a structured modeling method, a comprehensive model to characterize the photolithography process was developed. An …
A Simulation Model To Characterize Photolithography Process Of A Semiconductor Wafer Fabrication, Amr Arisha, Paul Young, Mohie El Baradie
A Simulation Model To Characterize Photolithography Process Of A Semiconductor Wafer Fabrication, Amr Arisha, Paul Young, Mohie El Baradie
Articles
The pressures on semiconductor manufacturers due to cost considerations, rapid growth of process technology, quality constraints, feature size reduction, and increasingly complex products are requiring ever higher efficiency from manufacturing facilities. The complexity of manufacturing high capacity semiconductor devices means that it is impossible to analyze the process control parameters and the production configurations using traditional analytical models. There is, therefore, an increasing need for effective models of each manufacturing process, characterizing and analyzing the process in detail, allowing the effect of changes in the production environment on the process to be predicted. The photolithography process is one of the …