Operations Research, Systems Engineering and Industrial Engineering Commons^™

Study Of Micro Rotary Ultrasonic Machining, Aarati Sarwade

Department of Industrial and Management Systems Engineering: Dissertations, Theses, and Student Research

Product miniaturization for applications in fields such as biotechnology, medical devices, aerospace, optics and communications has made the advancement of micromachining techniques essential. Machining of hard and brittle materials such as ceramics, glass and silicon is a formidable task. Rotary ultrasonic machining (RUM) is capable of machining these materials. RUM is a hybrid machining process which combines the mechanism of material removal of conventional grinding and ultrasonic machining. Downscaling of RUM for micro scale machining is essential to generate miniature features or parts from hard and brittle materials.

The goal of this thesis is to conduct a feasibility study and …