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Full-Text Articles in Operations Research, Systems Engineering and Industrial Engineering
Intelligent Simulation-Based Lot Scheduling Of Photolithography Toolsets In A Wafer Fabrication Facility, Amr Arisha, Paul Young
Intelligent Simulation-Based Lot Scheduling Of Photolithography Toolsets In A Wafer Fabrication Facility, Amr Arisha, Paul Young
Conference papers
Scheduling of a semiconductor manufacturing facility is one of the most complex tasks encountered. Confronted with a high technology product market, semiconductor manufacturing is increasingly more dynamic and competitive in the introduction of new products in shorter time intervals. Photolithography, being one of the processes repeated often, is a fabrication bottleneck. Lot scheduling within photolithography is a challenging activity where substantial improvements in factory performance can be made. The proposed scheduling methodology integrates two common approaches, simulation and artificial intelligence. Using detailed simulation modeling within a structured modeling method, a comprehensive model to characterize the photolithography process was developed. An …
Thin-Film Simulation Model For Comparing Production Schedules In A Semiconductor Fabrication Facility, Amr Arisha, Paul Young
Thin-Film Simulation Model For Comparing Production Schedules In A Semiconductor Fabrication Facility, Amr Arisha, Paul Young
Conference papers
Analysis of advanced manufacturing systems in any manufacturing industry requires certain level of knowledge about the system. Flexible manufacturing cells, in particular, are commonly used in most wafer fabrication to provide the ability to change product without requiring the construction of new manufacturing plant. This level of flexibility comes at a significant capital cost and, in order to achieve the maximum potential of each cell, it is essential to characterize and establish the performance of these cells in detail before a new production plan is implemented. Using state-of-the-art computer simulation and a structured modelling methodology a generic model of flexible …
Applications Of Simulation In Semiconductor Manufacturing Facilities, Amr Arisha, Paul Young
Applications Of Simulation In Semiconductor Manufacturing Facilities, Amr Arisha, Paul Young
Conference papers
Semiconductor fabrication facilities face many challenges through the many phases of their life cycle including design, build, various production ramps, and many levels of production. Confronted with global competition and rapidly changing technology and customer requirements, there is an increasing demand for rapid solution techniques to improve efficiency in manufacturing. The complexities and forces of both market and the process combine to make the use of simulation crucial at many different planning and control levels. While not a panacea for sustainable performance, simulation provides an effective vehicle for defining the path from competitive concepts to real world solutions and gives …