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A Simulation Model To Characterize Photolithography Process Of A Semiconductor Wafer Fabrication, Amr Arisha, Paul Young, Mohie El Baradie

Articles

The pressures on semiconductor manufacturers due to cost considerations, rapid growth of process technology, quality constraints, feature size reduction, and increasingly complex products are requiring ever higher efficiency from manufacturing facilities. The complexity of manufacturing high capacity semiconductor devices means that it is impossible to analyze the process control parameters and the production configurations using traditional analytical models. There is, therefore, an increasing need for effective models of each manufacturing process, characterizing and analyzing the process in detail, allowing the effect of changes in the production environment on the process to be predicted. The photolithography process is one of the …