Operations Research, Systems Engineering and Industrial Engineering Commons^™

Intelligent Simulation-Based Lot Scheduling Of Photolithography Toolsets In A Wafer Fabrication Facility, Amr Arisha, Paul Young

Conference papers

Scheduling of a semiconductor manufacturing facility is one of the most complex tasks encountered. Confronted with a high technology product market, semiconductor manufacturing is increasingly more dynamic and competitive in the introduction of new products in shorter time intervals. Photolithography, being one of the processes repeated often, is a fabrication bottleneck. Lot scheduling within photolithography is a challenging activity where substantial improvements in factory performance can be made. The proposed scheduling methodology integrates two common approaches, simulation and artificial intelligence. Using detailed simulation modeling within a structured modeling method, a comprehensive model to characterize the photolithography process was developed. An …