Operations Research, Systems Engineering and Industrial Engineering Commons^™

Hybrid Tabu Search Algorithm For Unrelated Parallel Machine Scheduling In Semiconductor Fabs With Setup Times, Job Release, And Expired Times, Changyu Chen, Madhi Fathi, Marzieh Khakifirooz, Kan Wu

Research Collection School Of Computing and Information Systems

This research is motivated by a scheduling problem arising in the ion implantation process of wafer fabrication. The ion implementation scheduling problem is modeled as an unrelated parallel machine scheduling (UPMS) problem with sequence-dependent setup times that are subject to job release time and expiration time of allowing a job to be processed on a specific machine, defined as: R|rj,eij,STsd|Cmax. The objective is first to maximize the number of processed jobs, then minimize the maximum completion time (makespan), and finally minimize the maximum completion times of the non-bottleneck machines. A mixed-integer programming (MIP) model is proposed as a solution approach …