Operations Research, Systems Engineering and Industrial Engineering Commons^™

A Framework For Determining The Reliability Of Nanoscale Metallic Oxide Semiconductor (Mos) Devices, Wilkistar Otieno

USF Tampa Graduate Theses and Dissertations

An increase in worldwide investments during the past several decades has pro-pelled scienti c breakthroughs in nanoscience and technology research to new and exciting levels. To ensure that these discoveries lead to commercially viable prod-ucts, it is important to address some of the fundamental engineering and scientific challenges related to nanodevices. Due to the centrality of reliability to product integrity, nanoreliability requires critical analysis and understanding to ensure long-term sustainability of nanodevices and systems. In this study, we construct a relia-bility framework for nanoscale dielectric lms used in Metallic Oxide Semiconductor (MOS) devices. The successful fabrication and incorporation of metallic …