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A Comparative Study On Machining Capabilities Of Wet And Dry Nanoscale Electro-Machining, Muhammad P. Jahan, Kamlakar P. Rajurkar, Ajay P. Malshe

Department of Mechanical and Materials Engineering: Faculty Publications

Presently, the nano scale electro-machining (nano-EM) process has been demonstrated in both the liquid and air dielectric mediums, which are known as wet and dry nano-EM respectively. In the current study, two important aspects of the nano-EM have been investigated: the minimum possible feature dimension and mass fabrication capability of nano-EM. Firstly, the investigation has been done on the capability of machining graphene at atomic scale with focus on obtaining smallest possible nano-feature using the wet nano-EM. Secondly, the ability of the nano-EM process for the fabrication of arrays of nano-holes has been investigated using dry nano-EM. It was found …