Nanoscience and Nanotechnology Commons^™

Atomistic Approach To Alloy Scattering In Si(1-X)Ge(X), Saumitra R. Mehrotra, Abhijeet Paul, Gerhard Klimeck

Birck and NCN Publications

SiGe alloy scattering is of significant importance with the introduction of strained layers and SiGe channels into complementary metal-oxide semiconductor technology. However, alloy scattering has till now been treated in an empirical fashion with a fitting parameter. We present a theoretical model within the atomistic tight-binding representation for treating alloy scattering in SiGe. This approach puts the scattering model on a solid atomistic footing with physical insights. The approach is shown to inherently capture the bulk alloy scattering potential parameters for both n-type and p-type
carriers and matches experimental mobility data.