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Articles 1 - 2 of 2
Full-Text Articles in Nanoscience and Nanotechnology
Transport-Based Dopant Metrology In Advanced Finfets, Gabriel P. Lansbergen, Rajib Rahman, Cameron J. Wellard, Jaap Caro, Nadine Collaert, Serge Biesemans, Gerhard Klimeck, Lloyd C. L. Hollenberg, Sven Rogge
Transport-Based Dopant Metrology In Advanced Finfets, Gabriel P. Lansbergen, Rajib Rahman, Cameron J. Wellard, Jaap Caro, Nadine Collaert, Serge Biesemans, Gerhard Klimeck, Lloyd C. L. Hollenberg, Sven Rogge
Other Nanotechnology Publications
Ultra-scaled FinFET transistors bear unique fingerprint-like device-to-device differences attributed to random single impurities. Through correlation of experimental data with multimillion atom simulations in NEMO 3-D, we can identify the impurity’s chemical species and determine their concentration, local electric field and depth below the Si/SiO2 interface. The ability to model the excited states rather than just the ground states is the critical need. We therefore demonstrate a new approach to atomistic impurity metrology and confirm the assumption of tunneling through individual impurity quantum states.
Level Spectrum Of Single Gated As Donors, Gabriel P. Lansbergen, Rajib Rahman, J. Caro, N. Collaert, S. Biesemans, Gerhard Klimeck, S. Rogge, L.C. L. Hollenberg
Level Spectrum Of Single Gated As Donors, Gabriel P. Lansbergen, Rajib Rahman, J. Caro, N. Collaert, S. Biesemans, Gerhard Klimeck, S. Rogge, L.C. L. Hollenberg
Other Nanotechnology Publications
We study the electrical transport through single As donors incorporated in the channel of a FinFET, i.e. a donor in a three-terminal geometry. By means of spectroscopic measurements in conjuction with a NEMO-3D model, we can identify the excited states and associate them with either the donors Coulomb potential, a triangular well at the interface or a hybridized combination of the two. The correspondence between the transport measurements, the theoretical model and the local environment provides an atomic understanding of actual gated donors in a nanostructure.