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Optical Sub-Diffraction Limited Focusing For Confined Heating And Lithography, Luis M. Traverso

Open Access Dissertations

Electronics and nanotechnology is constantly demanding a decrease in size of fabricated nanoscale features. This decrease in size has become much more difficult recently due to the limited resolution of optical systems that are fundamental to many nanofabrication methods. A lot of effort has been made to fabricate devices smaller than the diffraction limit of light. Creating devices that are capable of confining fields by means of interference patterns of propagating wave modes and surface plasmon, has proven successful to confine light into smaller spot sizes.

Zone plate diffraction lenses generate spots with dimensions very close to the diffraction limit. …