Nanoscience and Nanotechnology Commons^™

A Nanoindentation Study Of The Fatigue Properties Of Al/A-Si Core-Shell Nanostructures, Jason Steck

Mechanical Engineering Undergraduate Honors Theses

Nanostructure-textured surfaces can reduce friction and increase the reliability of micro- and nanoelectromechanical systems (NEMS/MEMS). For MEMS incorporating moving parts, the fatigue properties of nanostructures pose a challenge to their reliability in long-term applications. In this study, the fatigue behavior of hemispherical Al/a-Si core-shell nanostructures (CSNs), bare hemispherical Al nanodots, and a flat Al/a-Si layered thin film have been studied using nanoindentation and nano-scale dynamic mechanical analysis (nano-DMA) techniques. Fatigue testing with nano-DMA shows that the deformation resistance of CSNs persists through 5.0 × 10⁴ loading cycles at estimated contact pressures greater than 15 GPa. When the a-Si shell …