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Carbon Nanotube-Based Microscale Capacitive Flow Sensors, Nathaniel Holmes

Electronic Thesis and Dissertation Repository

Micro-scale flow sensors present several advantages over traditional flow sensing
methods, including minimal flow disruption, high spatial resolution, and low unit
cost. Many existing micro-scale thermal and piezo flow sensors struggle with temperature drift and require complicated fabrication processes. This thesis details
the development of a 60 μm by 60 μm by 50 μm drag-based capacitive flow sensor
constructed from vertically aligned carbon nanotube forests. The construction
of a thermal chemical vapour deposition system for sensor synthesis is also de-
tailed. Manual manipulation of the sensor with an atomic force microscope probe
was found to produce a full scale signal …