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Nanoscience and Nanotechnology Commons

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Theses/Dissertations

2016

Materials Science and Engineering

Integrated circuits

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Full-Text Articles in Nanoscience and Nanotechnology

Magnetoresistance Of A Low-K Dielectric, Brian Thomas Mcgowan Jan 2016

Magnetoresistance Of A Low-K Dielectric, Brian Thomas Mcgowan

Legacy Theses & Dissertations (2009 - 2024)

Low-k dielectrics have been incorporated into advanced computer chip technologies as a part of the continuous effort to improve computer chip performance. One drawback associated with the implementation of low-k dielectrics is the large leakage current which conducts through the material, relative to silica. Another drawback is that the breakdown voltage of low-k dielectrics is low, relative to silica [1]. This low breakdown voltage makes accurate reliability assessment of the failure mode time dependent dielectric breakdown (TDDB) in low-k dielectrics critical for the successful implementation of these materials. The accuracy with which one can assess this reliability is currently a …


Texture And Microstructure Of Ipvd Copper Manganese Seed In 1 Μm & 70 Nm Wide Damascene Trenches, Robert Stuart Brown Jan 2016

Texture And Microstructure Of Ipvd Copper Manganese Seed In 1 Μm & 70 Nm Wide Damascene Trenches, Robert Stuart Brown

Legacy Theses & Dissertations (2009 - 2024)

This thesis describes the grain texture and microstructure of Ionized Physical Vapor Deposition (iPVD) Copper Manganese seed in 1 µm and 70 nm wide damascene trenches. Using Transmission Electron Microscopy (TEM) imaging and diffraction pattern analysis, the grain size and general orientation of the grains were determined. It was found that the 1 µm wide trenches contained larger grains and more texture than that of the 70 nm wide trenches. While this thesis builds upon previous work by Brendan O’Brien in the Dunn group, one significantly different finding will be presented regarding the structure on the sidewall of the trenches. …