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Laser-Spark Multicharged Ion Implantation System ‒ Application In Ion Implantation And Neural Deposition Of Carbon In Nickel (111), Oguzhan Balki

Electrical & Computer Engineering Theses & Dissertations

Carbon ions generated by ablation of a carbon target using an Nd:YAG laser pulse (wavelength λ = 1064 nm, pulse width τ = 7 ns, and laser fluence of 10-110 J/cm²) are characterized. Time-of-flight analyzer, a three-mesh retarding field analyzer, and an electrostatic ion energy analyzer are used to study the charge and energy of carbon ions generated by laser ablation. The dependencies of the ion signal on the laser fluence, laser focal point position relative to target surface, and the acceleration voltage are described. Up to C⁴⁺ are observed. When no acceleration voltage is applied between …