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Application Of Nano-Imprint Lithography For Next Generation Carbon Nanotube-Based Devices, Svitlana Fialkova

Dissertations

This research report addresses the development of 3D carbon nanostructures that can provide unique capabilities for manufacturing carbon nanotube (CNT) electronic components, electrochemical probes, biosensors and tissue scaffolds. The shaped CNT arrays were grown on patterned catalytic substrate by chemical vapor deposition (CVD) method. The new fabrication process for catalyst patterning based on combination of nano-imprint lithography (NIL), magnetron sputtering and reactive etching techniques was proposed and studied. The optimal process parameters for each technique were evaluated. The catalyst was made by deposition of Fe and Co nanoparticles over alumina support layer on Si/SiO₂ substrate. The metal particles were …