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Two-Dimensional Scalar Differential Equations For Transversely Varying Thickness Modes In Piezoelectric Plates And Applications In Acoustic Wave Resonator Sensors, Huijing He

Department of Mechanical and Materials Engineering: Dissertations, Theses, and Student Research

Generalizations are made for three types of well-known and widely used twodimensional scalar differential equations in the literature describing transversely varying thickness modes in piezoelectric plate resonators. They are for singly-rotated quartz plates, doubly-rotated quartz plates, and plates of crystals of class 6mm with the c-axis along the plate thickness, respectively. The purpose of the generalizations is to include the effects of surface mechanical loads such as mass layers or fluids for resonator -based acoustic wave sensor applications. Surface acoustic impedance is introduced to take into account various surface loads in a general manner for time-harmonic motions. Both unelectroded and …