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University of Nebraska - Lincoln

Dry nano-EM

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Full-Text Articles in Nanoscience and Nanotechnology

A Comparative Study On Machining Capabilities Of Wet And Dry Nanoscale Electro-Machining, Muhammad P. Jahan, Kamlakar P. Rajurkar, Ajay P. Malshe Jan 2016

A Comparative Study On Machining Capabilities Of Wet And Dry Nanoscale Electro-Machining, Muhammad P. Jahan, Kamlakar P. Rajurkar, Ajay P. Malshe

Department of Mechanical and Materials Engineering: Faculty Publications

Presently, the nano scale electro-machining (nano-EM) process has been demonstrated in both the liquid and air dielectric mediums, which are known as wet and dry nano-EM respectively. In the current study, two important aspects of the nano-EM have been investigated: the minimum possible feature dimension and mass fabrication capability of nano-EM. Firstly, the investigation has been done on the capability of machining graphene at atomic scale with focus on obtaining smallest possible nano-feature using the wet nano-EM. Secondly, the ability of the nano-EM process for the fabrication of arrays of nano-holes has been investigated using dry nano-EM. It was found …


A Comparative Study Of The Dry And Wet Nano-Scale Electro-Machining, M. P. Jahan, K. R. Virwani, Kamlakar P. Rajurkar, A. P. Malshe Jan 2013

A Comparative Study Of The Dry And Wet Nano-Scale Electro-Machining, M. P. Jahan, K. R. Virwani, Kamlakar P. Rajurkar, A. P. Malshe

Department of Mechanical and Materials Engineering: Faculty Publications

In recent years, a nano-electromachining (nano-EM) process based on a scanning tunneling microscope (STM) platform has been demonstrated. Nano-EM is capable of machining nano-features, under both, liquid dielectric (wet nano-EM) and air dielectric (dry nano-EM) media. The objective of this paper is to present a comparative study between the wet and dry nano-EM processes based on process mechanism, machining performance, consistency and dimensional repeatability of these two processes. The comparison of the two processes has been conducted at near field nano-EM, where the gap between the tool electrode and workpiece is 2 nm and the machining is performed at room …