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Articles 1 - 7 of 7
Full-Text Articles in Nanoscience and Nanotechnology
Direct Measurement Of Graphene Adhesion On Silicon Surface By Intercalation Of Nanoparticles, Zong Zong, Chia-Ling Chen, Mehmet R. Dokmeci, Kai-Tak Wan
Direct Measurement Of Graphene Adhesion On Silicon Surface By Intercalation Of Nanoparticles, Zong Zong, Chia-Ling Chen, Mehmet R. Dokmeci, Kai-Tak Wan
Kai-tak Wan
We report a technique to characterize adhesion of monolayered/multilayered graphene sheets on silicon wafer. Nanoparticles trapped at graphene-silicon interface act as point wedges to support axisymmetric blisters. Local adhesion strength is found by measuring the particle height and blister radius using a scanning electron microscope. Adhesion energy of the typical graphene-silicon interface is measured to be 151±28 mJ/m2. The proposed method and our measurements provide insights in fabrication and reliability of microelectromechanical/nanoelectromechanical systems.
Direct Measurement Of Graphene Adhesion On Silicon Surface By Intercalation Of Nanoparticles, Zong Zong, Chia-Ling Chen, Mehmet Dokmeci, Kai-Tak Wan
Direct Measurement Of Graphene Adhesion On Silicon Surface By Intercalation Of Nanoparticles, Zong Zong, Chia-Ling Chen, Mehmet Dokmeci, Kai-Tak Wan
Mehmet R. Dokmeci
We report a technique to characterize adhesion of monolayered/multilayered graphene sheets on silicon wafer. Nanoparticles trapped at graphene-silicon interface act as point wedges to support axisymmetric blisters. Local adhesion strength is found by measuring the particle height and blister radius using a scanning electron microscope. Adhesion energy of the typical graphene-silicon interface is measured to be 151±28 mJ/m2. The proposed method and our measurements provide insights in fabrication and reliability of microelectromechanical/nanoelectromechanical systems.
Mechanical And Electrical Evaluation Of Parylene-C Encapsulated Carbon Nanotube Networks On A Flexible Substrate, Chia-Ling Chen, Ernesto Lopez, Yung-Joon Jung, Sinan Müftü, Selvapraba Selvarasah, Mehmet Dokmeci
Mechanical And Electrical Evaluation Of Parylene-C Encapsulated Carbon Nanotube Networks On A Flexible Substrate, Chia-Ling Chen, Ernesto Lopez, Yung-Joon Jung, Sinan Müftü, Selvapraba Selvarasah, Mehmet Dokmeci
Sinan Müftü
Carbon nanotube networks are an emerging conductive nanomaterial with applications including thin film transistors, interconnects, and sensors. In this letter, we demonstrate the fabrication of single-walled carbon nanotube (SWNT) networks on a flexible polymer substrate and then provide encapsulation utilizing a thin parylene-C layer. The encapsulated SWNT network was subjected to tensile tests while its electrical resistance was monitored. Tests showed a linear-elastic response up to a strain value of 2.8% and nearly linear change in electrical resistance in the 0%–2% strain range. The networks’ electrical resistance was monitored during load-unload tests of up to 100 cycles and was hysteresis-free.
Interfacial And Electrokinetic Characterization Of Ipa Solutions Related To Semiconductor Wafer Drying And Cleaning, Jin-Goo Park, Sang-Ho Lee, Ju-Suk Ryu, Yi-Koan Hong, Tae-Gon Kim, Ahmed A. Busnaina
Interfacial And Electrokinetic Characterization Of Ipa Solutions Related To Semiconductor Wafer Drying And Cleaning, Jin-Goo Park, Sang-Ho Lee, Ju-Suk Ryu, Yi-Koan Hong, Tae-Gon Kim, Ahmed A. Busnaina
Ahmed A. Busnaina
In this study, the interfacial and electrokinetic phenomena of mixtures of isopropyl alcohol (IPA) and deionized (DI) water in relation to semiconductor wafer drying is investigated. The dielectric constant of an IPA solution linearly decreased from 78 to 18 with the addition of IPA to DI water. The viscosity of IPA solutions increased as the volume percentage of IPA in DI water increased. The zeta potentials of silica particles and silicon wafers were also measured in IPA solutions. The zeta potential approached neutral values as the volume ratio of IPA in DI water increased. A surface tension decrease from 72 …
Experimental And Numerical Investigation Of Nanoparticle Removal Using Acoustic Streaming And The Effect Of Time, Kaveh Bakhtari, Rasim O. Guldiken, Prashanth Makaram, Ahmed A. Busnaina, Jin-Goo Park
Experimental And Numerical Investigation Of Nanoparticle Removal Using Acoustic Streaming And The Effect Of Time, Kaveh Bakhtari, Rasim O. Guldiken, Prashanth Makaram, Ahmed A. Busnaina, Jin-Goo Park
Ahmed A. Busnaina
Theremoval of nanoparticles is becoming increasingly challenging as the minimumlinewidth continues to decrease in semiconductor manufacturing. In this paper,the removal of nanoparticles from flat substrates using acoustic streamingis investigated. Bare silicon wafers and masks with a 4 nmsilicon cap layer are cleaned. The silicon-cap films are usedin extreme ultraviolet masks to protect Mo–Si reflective multilayers. Theremoval of 63 nm polystyrene latex (PSL) particles from these substratesis conducted using single-wafer megasonic cleaning. The results show higherthan 99% removal of PSL nanoparticles. The results also showthat dilute SC1 provides faster removal of particles, which isalso verified by the analytical analysis. Particle removal …
Mechanical And Electrical Evaluation Of Parylene-C Encapsulated Carbon Nanotube Networks On A Flexible Substrate, Chia-Ling Chen, Ernesto Lopez, Yung-Joon Jung, Sinan Müftü, Selvapraba Selvarasah, Mehmet R. Dokmeci
Mechanical And Electrical Evaluation Of Parylene-C Encapsulated Carbon Nanotube Networks On A Flexible Substrate, Chia-Ling Chen, Ernesto Lopez, Yung-Joon Jung, Sinan Müftü, Selvapraba Selvarasah, Mehmet R. Dokmeci
Yung Joon Jung
Carbon nanotube networks are an emerging conductive nanomaterial with applications including thin film transistors, interconnects, and sensors. In this letter, we demonstrate the fabrication of single-walled carbon nanotube (SWNT) networks on a flexible polymer substrate and then provide encapsulation utilizing a thin parylene-C layer. The encapsulated SWNT network was subjected to tensile tests while its electrical resistance was monitored. Tests showed a linear-elastic response up to a strain value of 2.8% and nearly linear change in electrical resistance in the 0%–2% strain range. The networks’ electrical resistance was monitored during load-unload tests of up to 100 cycles and was hysteresis-free.
Mechanical And Electrical Evaluation Of Parylene-C Encapsulated Carbon Nanotube Networks On A Flexible Substrate, Chia-Ling Chen, Ernesto Lopez, Yung-Joon Jung, Sinan Müftü, Selvapraba Selvarasah, Mehmet R. Dokmeci
Mechanical And Electrical Evaluation Of Parylene-C Encapsulated Carbon Nanotube Networks On A Flexible Substrate, Chia-Ling Chen, Ernesto Lopez, Yung-Joon Jung, Sinan Müftü, Selvapraba Selvarasah, Mehmet R. Dokmeci
Mehmet R. Dokmeci
Carbon nanotube networks are an emerging conductive nanomaterial with applications including thin film transistors, interconnects, and sensors. In this letter, we demonstrate the fabrication of single-walled carbon nanotube (SWNT) networks on a flexible polymer substrate and then provide encapsulation utilizing a thin parylene-C layer. The encapsulated SWNT network was subjected to tensile tests while its electrical resistance was monitored. Tests showed a linear-elastic response up to a strain value of 2.8% and nearly linear change in electrical resistance in the 0%–2% strain range. The networks’ electrical resistance was monitored during load-unload tests of up to 100 cycles and was hysteresis-free.