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Full-Text Articles in Nanoscience and Nanotechnology
An Investigation On The Interface Corrosion Behaviors Of Cobalt Interconnects In Chemical Mechanical Polishing Slurry, Kai-Xuan Qin, Peng-Fei Chang, Yu-Lin Huang, Ming Li, Tao Hang
An Investigation On The Interface Corrosion Behaviors Of Cobalt Interconnects In Chemical Mechanical Polishing Slurry, Kai-Xuan Qin, Peng-Fei Chang, Yu-Lin Huang, Ming Li, Tao Hang
Journal of Electrochemistry
Cobalt is widely regarded as the most promising interconnect material for 10 nm node and beyond. The development of a chemical mechanical planarization (CMP) slurry suitable for cobalt interconnect is a critical component for the application of cobalt interconnect. During CMP process of the interconnect layer, the achievement of high-quality surface after planarization is greatly challenged by the metal corrosion in CMP slurry. In this contribution, the corrosion behavior of cobalt in a slurry with potassium persulfate (KPS) as an oxidizer, glycine as a complexing agent, and benzotriazole (BTA) as an inhibitor was investigated. Static erosion rates (SER) of cobalt …
Applications Of Spectroscopic Ellipsometry In Corrosion Investigation, Ling-Jie Li, Yu-Ling He, Jing-Lei Lei, Sheng Tao Zhang
Applications Of Spectroscopic Ellipsometry In Corrosion Investigation, Ling-Jie Li, Yu-Ling He, Jing-Lei Lei, Sheng Tao Zhang
Journal of Electrochemistry
As a highly-sensitive and non-destructive in situ technique, spectroscopic ellipsometry has been widely applied in corrosion investigation to acquire the dynamic information of the “electrode-medium” interface during corrosion. This paper lays out some representative demonstrations in several established optical models used to interpret data obtained with spectroscopic ellipsometry in corrosion investigation. In addition, the latest trends in development of this technique are analyzed.
Study On Electrochemical Impedance Spectroscopy Of Carbon Steel Eroded In Methyldiethanolamine Solution, Dong-Ping Wei, Rong-Zong Hu, Dan-Mei Pan, Wei-Xiong Huang, Rui Dong
Study On Electrochemical Impedance Spectroscopy Of Carbon Steel Eroded In Methyldiethanolamine Solution, Dong-Ping Wei, Rong-Zong Hu, Dan-Mei Pan, Wei-Xiong Huang, Rui Dong
Journal of Electrochemistry
Corrosion behavior of carbon steel in methyldiethanolamine(MDEA) solution was investigated by Electrochemical Impedance Spectroscopy(EIS).The results were showed that the corrosion rate of carbon steel in solution containing dissolved oxygen is higher than that in solution removed of dissolved oxygen before cathodic activation.They were reversed after cathodic activation.The corrosion rate is increased at first and then decreased when the concentration of MDEA is increased in the blank solutions.In the simulated solutions containing quantities of!heat-stable salts(HSS),the corrosion rate is decreased monotonously with increase of the MDEA concentration.As anodic polarization potential is increased,the EIS of carbon steel in HSS simulated solution showed characteristics …
Electrodeposition Nanolaminated Growth Of Zinc, Ying Cao, Tian-Hui Shen, Jing-Yuan Yao, Gui-Fu Ding
Electrodeposition Nanolaminated Growth Of Zinc, Ying Cao, Tian-Hui Shen, Jing-Yuan Yao, Gui-Fu Ding
Journal of Electrochemistry
Nanolaminated growth of the electrodeposition of zinc was studied. The structure and size of crystalline in zinc coatings were investigated by using FEG-TEM and XRD. The corrosion tests of the zinc deposition and the Coatings-Neutral salt spray test were performed, the capability in corrosion resistance of the nanolaminated growth was better than that of others.