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Full-Text Articles in Nanoscience and Nanotechnology
Focused Electron Beam Induced Deposition Of Copper With High Resolution And Purity From Aqueous Solutions, Samaneh Esfandiarpour, Lindsay Boehme, J. Todd Hastings
Focused Electron Beam Induced Deposition Of Copper With High Resolution And Purity From Aqueous Solutions, Samaneh Esfandiarpour, Lindsay Boehme, J. Todd Hastings
Electrical and Computer Engineering Faculty Publications
Electron-beam induced deposition of high-purity copper nanostructures is desirable for nanoscale rapid prototyping, interconnection of chemically synthesized structures, and integrated circuit editing. However, metalorganic, gas-phase precursors for copper introduce high levels of carbon contamination. Here we demonstrate electron beam induced deposition of high-purity copper nanostructures from aqueous solutions of copper sulfate. The addition of sulfuric acid eliminates oxygen contamination from the deposit and produces a deposit with ~95 at% copper. The addition of sodium dodecyl sulfate (SDS), Triton X-100, or polyethylene glycole (PEG) improves pattern resolution and controls deposit morphology but leads to slightly reduced purity. High resolution nested lines …