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On Eigenmodes, Stiffness, And Sensitivity Of Atomic Force Microscope Cantilevers In Air Versus Liquids, Daniel Kiracofe, Arvind Raman

Birck and NCN Publications

The effect of hydrodynamic loading on the eigenmode shapes, modal stiffnesses, and optical lever sensitivities of atomic force microscope (AFM) microcantilevers is investigated by measuring the vibrations of such microcantilevers in air and water using a scanning laser Doppler vibrometer. It is found that for rectangular tipless microcantilevers, the measured fundamental and higher eigenmodes and their equivalent stiffnesses are nearly identical in air and in water. However, for microcantilevers with a tip mass or for picket shaped cantilevers, there is a marked difference in the second (and higher) eigenmode shapes between air and water that leads to a large decrease …