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Surface Acoustic Wave Characterization And Interdigitated Transducer Optimization For Studying Stress-Enhanced Phenomena, Brian D. Rummel

Nanoscience and Microsystems ETDs

Surface acoustic wave devices have not yet achieved their full potential as the effects of standing acoustic fields on stress-sensitive phenomena in semiconductor systems have been largely unexplored. From this perspective, it is necessary to develop novel methods to characterize surface acoustic wave devices quantitatively and prepare an experimental platform to probe stress-enhanced processes. In this dissertation, interdigitated transducer devices are fabricated on gallium arsenide to evaluate their potential impact on strain-enhanced phenomena. A novel Raman characterization technique characterizes the surface stress induced by a standing acoustic field, revealing stress values on the order of 10⁸ Pa. FEM software …