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An Exploration Of Focused Electron Beam-Induced-Deposition At Cryogenic Temperatures, Matthew Bresin
An Exploration Of Focused Electron Beam-Induced-Deposition At Cryogenic Temperatures, Matthew Bresin
Legacy Theses & Dissertations (2009 - 2024)
A modified version of electron beam-induced-deposition (EBID) has been studied, where cryogenic substrates were employed to alter the growth environment. Cryogenic substrates enabled multi-layer condensed phase films, which, upon electron exposure and reheating to room temperature, exhibited several unique surface morphologies not present in traditional EBID deposits. By analyzing the composition and structure of the cryogenic deposits, along with simulation of energy deposition from exposure, a diffusion based growth mechanism has been proposed. To test the validity of the proposed model, several process variables were investigated including electron flux, electron fluence, condensate thickness and precursor type. Using the knowledge garnered …