Nanoscience and Nanotechnology Commons^™

Kinetic Monte Carlo Investigations Involving Atomic Layer Deposition Of Metal-Oxide Thinfilms, David Tyler Magness

MSU Graduate Theses

Atomic Layer Deposition is a method of manufacturing thin film materials. Metal-oxides such as zinc-oxide and aluminum-oxide are particularly interesting candidates for use in microelectronic devices such as tunnel junction barriers, transistors, Schottky diodes, and more. By adopting a 3D Kinetic Monte Carlo model capable of simulating ZnO deposition, the effect of parameters including deposition temperature, chamber pressure, and composition of the initial substrate at the beginning of deposition can be investigated. This code generates two random numbers: One is used to select a chemical reaction to occur from a list of all possible reactions and the second is used …

Strategies For The Stabilization Of Metal Anodes For Li And Na Metal Batteries, Yang Zhao

Electronic Thesis and Dissertation Repository

Li-metal batteries (LMBs) and Na-metal batteries (NMBs) are considered as the promising candidates to replace the conventional Li-ion batteries (LIBs) due to their high theoretical energy density. For LMBs and NMBs, Li metal and Na metal are the ultimate choices to achieve their high energy density due to the high specific capacity, low electrochemical potential and lightweight. However, as alkali metals, both Li and Na metal anodes suffer from serious challenges including 1) Li/Na dendrite formations and short circuits; 2) Low Coulombic efficiency (CE) and poor cycling performance; and 3) Infinite volume changes. This thesis mainly focuses on the design …

Development Of Nanomaterials For Lithium-Ion Batteries By Atomic Layer Deposition, Biqiong Wang

Electronic Thesis and Dissertation Repository

Lithium ion batteries (LIBs) have been the dominant candidate in the field of energy storage. The ever-growing demand of high energy and power density, longer battery life, and more assured safety level has geared the development of LIBs towards all-solid-state batteries (ASSBs). The solid-state nature allows more flexibility in battery design and higher area capacity to be obtained within limited space. Moreover, replacing liquid electrolytes with solid-state electrolytes (SSEs) is a most effective approach to achieve safer battery system. In addition, ASSBs hold great promise in the actual fabrication of microbatteries for microelectronics. Therefore, a technique which can synthesize materials …

On Developing Novel Energy-Relates Nanostructured Materials By Atomic Layer Deposition, Xiangbo Meng

Electronic Thesis and Dissertation Repository

ABSTRACT

This thesis presents the fabrication of a series of novel nanostructured materials using atomic layer deposition (ALD). In contrast to traditional methods including chemical vapor deposition (CVD), physical vapor deposition (PVD), and solution-based processes, ALD benefits the synthesis processes of nanostructures with many unrivalled advantages such as atomic-scale control, low temperature, excellent uniformity and conformality. Depending on the employed precursors, substrates, and temperatures, the ALD processes exhibited different characteristics. In particular, ALD has capabilities in fine-tuning compositions and structural phases. In return, the synthesis and the resultant nanostructured materials show many novelties.

This thesis covers ALD processes of four …